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Analysis Prober

CheckMate Series Probe Station
The Signatone CheckMate is an ultra-stable 200mm / 300mm analytical probe station with coarse and fine wafer stage movement to provide fast wafer movement as well as submicron resolution. The CheckMate series of analytical probe stations reflects a very simple philosophy of design – make it strong, make it stable, make it accurate and above all, make it easy to use.

Five versions of the CheckMate Probe Station are available for both 200mm and 300mm systems. The CM210 has manual control of both wafer and microscope stages and is pre-wired for easy in-the-field upgrade to motorized control. The CM220 has joystick controlled motorized movement of both the microscope and wafer stage. The CM230 has a joystick unit with precision dials to control both the microscope and wafer stages.
 

The CM240 uses a PC and has programmable capability for the microscope and up to four CAP (Computer Aided Probes) using the Signatone Solutions Windows based Software. The CM250 is semi-automatic with “step and repeat” programmability along with many other functions and accessories that offer the user an ergo-perfect work station.

The CheckMate Series Probe Stations are available with Signatone's local dry chamber option. This option provides a local environmental chamber around the wafer stage to provide:
  • Elimination of moisture or frost build-up when using a cold chuck (-65°C to +200°C)
  • A dark environment for making light sensitive measurements
  • EMI Protection, i.e., shielding from electromagnetic and electrostatic interference, allowing low current measurements using Signatone's Tripak triaxial technology. The Tripak package provides measurement capability down to the noise floor capability of instruments such as the HP4156A parametric analyzer ( 1 fA).
 

Whether your need is for failure analysis, product engineering, design/debug, or any of the many probing applications that Signatone addresses, the CheckMate Probe Station can be configured to meet your needs with accuracy. stability, ease-of-use, and a wide assortment of options and capabilities.

  • CM210 / CM220 / CM230 - Has manual control of both wafer and microscope stages and is pre-wired for easy in-the-field upgrade to motorized control.
  • CM240 / CM250 - Semi-automatic with “step and repeat” programmability along with many other functions and accessories that offer the user an ergo-perfect work station.
  • CM330 - Includes a 300mm X-Y wafer stage, the standard 300 series joystick with precision thumbwheel control, our Computer Aided Probe (CAP-946) with 0.5 micron resolution and a laser mounted on a high powered Motic microscope.